| Original language | English |
|---|---|
| Pages (from-to) | 91-100 |
| Number of pages | 10 |
| Journal | MICRO |
| Volume | 18 |
| Issue number | 7 |
| State | Published - Jul 2000 |
Using exclusion ring technology to avoid CVD tungsten bevel contamination
- Patrice Geraghty
- , Jack McInerney
Research output: Contribution to journal › Article › peer-review
3
Scopus
citations