Original language | English |
---|---|
Pages (from-to) | 91-100 |
Number of pages | 10 |
Journal | MICRO |
Volume | 18 |
Issue number | 7 |
State | Published - Jul 2000 |
Using exclusion ring technology to avoid CVD tungsten bevel contamination
Patrice Geraghty, Jack McInerney
Research output: Contribution to journal › Article › peer-review
3
Scopus
citations