Using exclusion ring technology to avoid CVD tungsten bevel contamination

Patrice Geraghty, Jack McInerney

Research output: Contribution to journalArticlepeer-review

3 Scopus citations
Original languageEnglish
Pages (from-to)91-100
Number of pages10
JournalMICRO
Volume18
Issue number7
StatePublished - Jul 2000

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