Universal Narrowband Wavefront Shaping with High Quality Factor Meta-Reflect-Arrays

Optical metasurfaces offer unprecedented flexibility in light wave manipulation but suffer weak resonant enhancement. Tackling this problem, we experimentally unveil a new phase gradient metasurface platform made entirely from individually addressable high quality factor (high-Q) silicon meta-atoms. Composed of pairs of nearly identical nanoblocks, these meta-atoms support dipolar-guided-mode resonances that, due to the controlled suppression of radiation loss, serve as highly sensitive phase pixels when placed above a mirror. A key novelty of this platform lies in the vanishingly small structural perturbations needed to produce universal phase fronts. Having fabricated elements with Q-factor ∼380 and spaced by λ/1.2, we achieve strong beam steering, up to 59% efficient, to angles 32.3°, 25.3°, and 20.9°, with variations in nanoantenna volume fractions across the metasurfaces of ≤2.6%, instead of >50% required by traditional versions. Aside from extreme sensitivity, the metasurfaces exhibit near-field intensity enhancement over 1000×. Taken together, these properties represent an exciting prospect for dynamic and nonlinear wave shaping.