Ultrathin highly porous alumina films prepared by alucone ABC molecular layer deposition (MLD)

  • Xinhua Liang
  • , Brian W. Evanko
  • , Alan Izar
  • , David M. King
  • , Ying Bing Jiang
  • , Alan W. Weimer

Research output: Contribution to journalArticlepeer-review

46 Scopus citations

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Material Science

Chemical Engineering