Ultra-thin microporous-mesoporous metal oxide films prepared by molecular layer deposition (MLD)

Xinhua Liang; Miao Yu; Jianhua Li; Ying Bing Jiang; Alan W. Weimer

doi:10.1039/b911888h

Ultra-thin microporous-mesoporous metal oxide films prepared by molecular layer deposition (MLD)

Xinhua Liang
, Miao Yu
, Jianhua Li
, Ying Bing Jiang
, Alan W. Weimer

Department of Energy, Environmental & Chemical Engineering

Research output: Contribution to journal › Article › peer-review

114 Scopus citations

Abstract

Porous aluminium oxide films with precisely controlled thickness down to several angstroms are deposited on particle surfaces from dense aluminium alkoxide hybrid polymer films by molecular layer deposition. Porous structures are obtained by either mild water etching at room temperature or calcination in air at elevated temperatures.

Original language	English
Pages (from-to)	7140-7142
Number of pages	3
Journal	Chemical Communications
Issue number	46
DOIs	https://doi.org/10.1039/b911888h
State	Published - 2009

Access to Document

10.1039/b911888h

Cite this

@article{c1f5696f89bc479c890d6e283a8845ae,

title = "Ultra-thin microporous-mesoporous metal oxide films prepared by molecular layer deposition (MLD)",

abstract = "Porous aluminium oxide films with precisely controlled thickness down to several angstroms are deposited on particle surfaces from dense aluminium alkoxide hybrid polymer films by molecular layer deposition. Porous structures are obtained by either mild water etching at room temperature or calcination in air at elevated temperatures.",

author = "Xinhua Liang and Miao Yu and Jianhua Li and Jiang, \{Ying Bing\} and Weimer, \{Alan W.\}",

year = "2009",

doi = "10.1039/b911888h",

language = "English",

pages = "7140--7142",

journal = "Chemical Communications",

issn = "1359-7345",

number = "46",

}

TY - JOUR

T1 - Ultra-thin microporous-mesoporous metal oxide films prepared by molecular layer deposition (MLD)

AU - Liang, Xinhua

AU - Yu, Miao

AU - Li, Jianhua

AU - Jiang, Ying Bing

AU - Weimer, Alan W.

PY - 2009

Y1 - 2009

N2 - Porous aluminium oxide films with precisely controlled thickness down to several angstroms are deposited on particle surfaces from dense aluminium alkoxide hybrid polymer films by molecular layer deposition. Porous structures are obtained by either mild water etching at room temperature or calcination in air at elevated temperatures.

AB - Porous aluminium oxide films with precisely controlled thickness down to several angstroms are deposited on particle surfaces from dense aluminium alkoxide hybrid polymer films by molecular layer deposition. Porous structures are obtained by either mild water etching at room temperature or calcination in air at elevated temperatures.

UR - https://www.scopus.com/pages/publications/70450202112

U2 - 10.1039/b911888h

DO - 10.1039/b911888h

M3 - Article

AN - SCOPUS:70450202112

SN - 1359-7345

SP - 7140

EP - 7142

JO - Chemical Communications

JF - Chemical Communications

IS - 46

ER -

Ultra-thin microporous-mesoporous metal oxide films prepared by molecular layer deposition (MLD)

Abstract

Access to Document

Other files and links

Fingerprint

Cite this