TY - JOUR
T1 - Trilayered ceramic-metal-polymer microcantilevers with dramatically enhanced thermal sensitivity
AU - Lin, Yen Hsi
AU - McConney, Michael E.
AU - Lemieux, Melburne C.
AU - Peleshanko, Sergiy
AU - Jiang, Chaoyang
AU - Singamaneni, Srikanth
AU - Tsukruk, Vladimir V.
PY - 2006/5/2
Y1 - 2006/5/2
N2 - The preparation of trilayered ceramic-metal-polymer microcantilevers with enhanced thermal sensitivity, was investigated. With sensitive optical or electrostatic readouts, the microcantilever-based devices can show resolution of several tens of milliKelvins with thermal sensitivity reaching 100 nmK -1 for microcantilevers with lengths around 100 μm. Rectangular and V-shaped silicon nitride microcantilevers with lengths of 200 and 310 μm and spring constants in the range 0.02-0.03 N m-1. The silicon nitride-gold microcantilever bends downward by about 100 nm owing to the mismatch of thermal expansion coefficients of gold and silicon nitride. The polymer-brush layers were reinforced with carbon nanotubes and metal nanoparticles. These trilayered polymer-metal-ceramic microcantilevers with dramatically enhanced thermal sensitivity can serve as the basis for the next generation of uncooled IR-sensor arrays with thermal and spatial resolution many times higher.
AB - The preparation of trilayered ceramic-metal-polymer microcantilevers with enhanced thermal sensitivity, was investigated. With sensitive optical or electrostatic readouts, the microcantilever-based devices can show resolution of several tens of milliKelvins with thermal sensitivity reaching 100 nmK -1 for microcantilevers with lengths around 100 μm. Rectangular and V-shaped silicon nitride microcantilevers with lengths of 200 and 310 μm and spring constants in the range 0.02-0.03 N m-1. The silicon nitride-gold microcantilever bends downward by about 100 nm owing to the mismatch of thermal expansion coefficients of gold and silicon nitride. The polymer-brush layers were reinforced with carbon nanotubes and metal nanoparticles. These trilayered polymer-metal-ceramic microcantilevers with dramatically enhanced thermal sensitivity can serve as the basis for the next generation of uncooled IR-sensor arrays with thermal and spatial resolution many times higher.
UR - https://www.scopus.com/pages/publications/33646536598
U2 - 10.1002/adma.200502232
DO - 10.1002/adma.200502232
M3 - Article
AN - SCOPUS:33646536598
SN - 0935-9648
VL - 18
SP - 1157
EP - 1161
JO - Advanced Materials
JF - Advanced Materials
IS - 9
ER -