Surface micromachined paraffin-actuated microvalve

Engineering

• Leak Rate 100%
• Flow Rate 50%
• Actuation 50%
• Control System 50%
• Differential Pressure 50%
• Flow Range 50%
• Active Element 50%
• Torr 50%
• Gas Flowrate 50%
• Nominal Dimension 50%
• Flow Velocity 50%
• Actuator 50%
• Surface Micro-Machining 50%
• Glass Substrate 50%

Keyphrases

• Paraffin 100%
• Microvalve 100%
• Surface Micromachining 100%
• Leakage Rate 50%
• Valve Structure 25%
• Actuation 25%
• Flow Range 25%
• Active Elements 25%
• Gas Flow Rate 25%
• Glass Substrate 25%
• Microactuators 25%
• Valve System 25%
• Single Substrate 25%
• Differential Pressure 25%
• Actuator Materials 25%
• Channel Material 25%
• Flow Control System 25%
• Control Valve 25%