Surface acoustic wave microfluidics

  • Leslie Y. Yeo
  • , James R. Friend

Research output: Contribution to journalArticlepeer-review

Abstract

Fluid manipulations at the microscale and beyond are powerfully enabled through the use of 10-1,000-MHz acoustic waves. A superior alternative in many cases to other microfluidic actuation techniques, such high-frequency acoustics is almost universally produced by surface acoustic wave devices that employ electromechanical transduction in wafer-scale or thin-film piezoelectric media to generate the kinetic energy needed to transport and manipulate fluids placed in adjacent microfluidic structures. These waves are responsible for a diverse range of complex fluid transport phenomena - from interfacial fluid vibration and drop and confined fluid transport to jetting and atomization - underlying a flourishing research literature spanning fundamental fluid physics to chip-scale engineering applications. We highlight some of this literature to provide the reader with a historical basis, routes for more detailed study, and an impression of the field's future directions.

Original languageEnglish
Pages (from-to)379-406
Number of pages28
JournalAnnual Review of Fluid Mechanics
Volume46
DOIs
StatePublished - Jan 2014

Keywords

  • Acoustics
  • Fluid-structural interaction
  • Interfacial phenomena
  • Lab on a chip
  • Piezoelectrics
  • Ultrasonics

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