TY - GEN
T1 - Silicon Nanoparticle Nucleation and Growth Processes in Low Temperature Flowing Plasmas
AU - Polito, J.
AU - Lanham, S. J.
AU - Husmann, E.
AU - Thimsen, E.
AU - Kushner, M. J.
N1 - Publisher Copyright:
© 2022 IEEE.
PY - 2022
Y1 - 2022
N2 - Nanoparticles (a few to tens of nm) having controllable optical, compositional, and structural properties can be synthesized in flowing low temperature plasmas (LTPs). LTP produced Si nanoparticles (NPs) are being investigated for use in catalysis, optics, and medicine. On the other hand, nucleation of NPs is undesirable in microelectronics fabrication where, with shrinking feature sizes, particles of only a few nm can produce defects. In both cases, a key to controlling NP growth or preventing their formation, is the onset of nucleation. This is typically the point that a critical cluster size is achieved and NPs grow by reaction with radicals that increase the size of the NP instead of creating new NPs. However, conditions leading to the onset of nucleation are not well characterized.
AB - Nanoparticles (a few to tens of nm) having controllable optical, compositional, and structural properties can be synthesized in flowing low temperature plasmas (LTPs). LTP produced Si nanoparticles (NPs) are being investigated for use in catalysis, optics, and medicine. On the other hand, nucleation of NPs is undesirable in microelectronics fabrication where, with shrinking feature sizes, particles of only a few nm can produce defects. In both cases, a key to controlling NP growth or preventing their formation, is the onset of nucleation. This is typically the point that a critical cluster size is achieved and NPs grow by reaction with radicals that increase the size of the NP instead of creating new NPs. However, conditions leading to the onset of nucleation are not well characterized.
UR - https://www.scopus.com/pages/publications/85134512497
U2 - 10.1109/ICOPS45751.2022.9813197
DO - 10.1109/ICOPS45751.2022.9813197
M3 - Conference contribution
AN - SCOPUS:85134512497
T3 - IEEE International Conference on Plasma Science
BT - 2022 IEEE International Conference on Plasma Science, ICOPS 2022
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2022 IEEE International Conference on Plasma Science, ICOPS 2022
Y2 - 22 May 2022 through 26 May 2022
ER -