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Robust estimation of line width roughness parameters
Kedar Patel
, Soumendra N. Lahiri
, Costas J. Spanos
Institute of Clinical and Translational Sciences (ICTS)
Research output
:
Contribution to journal
›
Article
›
peer-review
6
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Scopus citations
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Dive into the research topics of 'Robust estimation of line width roughness parameters'. Together they form a unique fingerprint.
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Keyphrases
Robust Estimation
100%
Roughness Parameters
100%
Line Width Roughness
100%
Next Generation Lithography
50%
Scanning Electron Micrograph
33%
Bootstrap Method
33%
Block Bootstrap
33%
Lithography Process
33%
Complete Description
16%
Process Optimization
16%
Limited Availability
16%
Three-parameter
16%
Estimation Method
16%
Systematic Difference
16%
Fitting Method
16%
Device Performance
16%
By Design
16%
Local Variation
16%
Process Performance
16%
Data Availability
16%
Dependent Data
16%
Weighted Least Squares
16%
Correlation Length
16%
Semiconductor Process
16%
Finite Length
16%
Nanoimprint Lithography
16%
Vectorized
16%
Root-mean-square Roughness
16%
Lithography
16%
Extreme Ultraviolet
16%
Variogram
16%
Variogram Model
16%
Performance Simulation
16%
Double Patterning Lithography
16%
Roughness Correlation
16%
Double Patterning
16%
Self-aligned Double Patterning
16%
Directed Self Assembly Lithography
16%
Critical Dimension Variation
16%
Roughness Profile
16%
Weighted Least Squares Fitting
16%
Roughness Exponent
16%
Litho-freeze-litho-etch
16%
Lithography Technology
16%
Engineering
Roughness Parameter
100%
Line Width
100%
Lithography
71%
Micrograph
28%
Critical Dimension
28%
Least Squares Method
28%
Root Mean Square
14%
Device Performance
14%
Complete Description
14%
Finite Length
14%
Estimation Procedure
14%
Nanoimprint Lithography
14%
Fitting Procedure
14%
Correlation Length
14%
Square Roughness
14%
Process Performance
14%
Agricultural and Biological Sciences
Least Squares Method
100%
Self Assembly
50%
Medicine and Dentistry
Linewidth
100%
Least Squares Method
28%
Bootstrapping
14%