Replica-molded high-Q polymer microresonators

Ultrahigh-Q microtoroids on a chip are applied as replication masters to demonstrate replica-molded high-Q microresonator arrays. Replica Q factors are nearly material loss limited, affirming the integrity of the replication process, and are as high as 5 times; 10⁶, or nearly a factor of 40 greater than previous polymer-based devices. Because the molding process is nondestructive, both the master and the molds can be reused. Additionally, by using a novel optical polymer (Vicast), we demonstrate storage of high-Q microresonators in the mold for weeks, providing a method to preserve the whispering-gallery Q factor.