Piezoelectric ultrasonic micro/milli-scale actuators

  • B. Watson
  • , J. Friend
  • , L. Yeo

Research output: Contribution to journalReview articlepeer-review

Abstract

A growing demand for actuators with a volume of less than 1 mm3 has driven researchers to produce a varied range of micro/milli-scale designs. By examining the underlying physics of the actuator operation we are able to demonstrate why piezoelectric ultrasonic actuators have the greatest potential to meet this need. Moreover, it allows us to create a new classification system for piezoelectric ultrasonic actuators, affording us a better understanding of the core characteristics of each class of actuator, which class is most suited to various applications, and highlights potential areas of future research.

Original languageEnglish
Pages (from-to)219-233
Number of pages15
JournalSensors and Actuators, A: Physical
Volume152
Issue number2
DOIs
StatePublished - Jun 18 2009

Keywords

  • Micro-actuator
  • Micro-motor
  • Piezoelectric
  • Review
  • Ultrasonic

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