Paraffin actuated surface micromachined valves

Keyphrases

• Paraffin 100%
• Actuated Surface 100%
• Surface Micromachining 100%
• Actuation 66%
• Microvalve 66%
• Thermal Expansion 33%
• Nonbonded 33%
• Gas Flow Rate 33%
• Process Technology 33%
• Single Substrate 33%
• Actuator Materials 33%
• Low Temperature Process 33%
• Channel Material 33%
• Single Die 33%

Material Science

• Surface (Surface Science) 100%
• Actuator 50%
• Micromachining 50%
• Gas Flow 50%
• Thermal Expansion 50%

Engineering

• Actuation 100%
• Gas Flowrate 50%
• Actuator 50%
• Surface Micro-Machining 50%