Abstract
A new, active, normally-open blocking microvalve that uses the thermal expansion of a sealed, thin paraffin patch for actuation has been fabricated and tested. The entire structure is batch-fabricated by surface micromachining the actuator and channel materials on top of a single substrate. The paraffin actuated microvalves are suitable for applications requiring many devices on a single die, low processing temperatures, and simple, non-bonded process technology. Gas flow rates in the 0.1-2.0 sccm range have been measured for several devices with actuation powers less than 50 mW.
| Original language | English |
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| Pages | 381-385 |
| Number of pages | 5 |
| State | Published - 2000 |
| Event | 13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000) - Miyazaki, Jpn Duration: Jan 23 2000 → Jan 27 2000 |
Conference
| Conference | 13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000) |
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| City | Miyazaki, Jpn |
| Period | 01/23/00 → 01/27/00 |