Abstract
Micromachining using a laser is a unique fabrication process that provides innovative solutions in a myriad of microengineering applications for industrial and research purposes. Laser micromachining offers a precise noncontact mode machining process that is used in the fabrication of miniature components with intricate geometry. These microcomponents are usually made of a multitude of materials with complex shape structures requiring submicron accuracy. Efficiency and accuracy of the laser micromachining process is of great importance. However, the main challenge in this process includes complicated residual stresses, recast layers, and heat affected zones (HAZs), which may cause distortion and alteration of the metallurgical microstructure, often leading to an inferior mechanical strength and lifetime of the component. This chapter reviews recent developments of laser micromachining processes that involve the integration of various micromachining processes for improving machinability. Specifically, this chapter deals with mechanical characterization and reliability testing of laser micromachined structures where the geometrical accuracy, surface properties, machining rate, and increase of process efficiency are of great concern.
| Original language | English |
|---|---|
| Title of host publication | Advances in Laser Materials Processing |
| Subtitle of host publication | Technology, Research and Applications |
| Publisher | Elsevier |
| Pages | 731-761 |
| Number of pages | 31 |
| ISBN (Electronic) | 9780081012529 |
| ISBN (Print) | 9780081012536 |
| DOIs | |
| State | Published - Jan 1 2017 |
Keywords
- Heat affected zone
- Laser micromachining
- Material fatigue
- Mechanical reliability
- Microstructure
- Microstructure evaluation
- Recast layer