Micromolding of high Q toroid resonators

A. Martin; L. Yang; D. Armani; K. Vahala

Micromolding of high Q toroid resonators

A. Martin, L. Yang, D. Armani, K. Vahala

Research output: Contribution to journal › Conference article › peer-review

Abstract

Using silica ultra-high-Q toroid microcavity masters, replica molding is applied to fabricate polymer microcavity arrays with Q factors in excess of 10⁵. It is demonstrated that anovel technique that replicates silica ultra-high-Q microtoroid cavity masters in Vicast and PDMS. This fabrication techniques results in planar polymer micro-cavity arrays with Q factors in excess 10⁵, and provides a potentially low cost method to manufacture resonator arrays.

Original language	English
Pages (from-to)	1022-1023
Number of pages	2
Journal	Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
Volume	2
State	Published - 2003
Event	2003 IEEE LEOS Annual Meeting Conference Proceedings - TUCSON, AZ, United States Duration: Oct 26 2003 → Oct 30 2003

Cite this

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title = "Micromolding of high Q toroid resonators",

abstract = "Using silica ultra-high-Q toroid microcavity masters, replica molding is applied to fabricate polymer microcavity arrays with Q factors in excess of 105. It is demonstrated that anovel technique that replicates silica ultra-high-Q microtoroid cavity masters in Vicast and PDMS. This fabrication techniques results in planar polymer micro-cavity arrays with Q factors in excess 105, and provides a potentially low cost method to manufacture resonator arrays.",

author = "A. Martin and L. Yang and D. Armani and K. Vahala",

year = "2003",

language = "English",

volume = "2",

pages = "1022--1023",

journal = "Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS",

issn = "1092-8081",

note = "2003 IEEE LEOS Annual Meeting Conference Proceedings ; Conference date: 26-10-2003 Through 30-10-2003",

}

TY - JOUR

T1 - Micromolding of high Q toroid resonators

AU - Martin, A.

AU - Yang, L.

AU - Armani, D.

AU - Vahala, K.

PY - 2003

Y1 - 2003

N2 - Using silica ultra-high-Q toroid microcavity masters, replica molding is applied to fabricate polymer microcavity arrays with Q factors in excess of 105. It is demonstrated that anovel technique that replicates silica ultra-high-Q microtoroid cavity masters in Vicast and PDMS. This fabrication techniques results in planar polymer micro-cavity arrays with Q factors in excess 105, and provides a potentially low cost method to manufacture resonator arrays.

AB - Using silica ultra-high-Q toroid microcavity masters, replica molding is applied to fabricate polymer microcavity arrays with Q factors in excess of 105. It is demonstrated that anovel technique that replicates silica ultra-high-Q microtoroid cavity masters in Vicast and PDMS. This fabrication techniques results in planar polymer micro-cavity arrays with Q factors in excess 105, and provides a potentially low cost method to manufacture resonator arrays.

UR - http://www.scopus.com/inward/record.url?scp=0344897203&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:0344897203

SN - 1092-8081

VL - 2

SP - 1022

EP - 1023

JO - Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

JF - Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

T2 - 2003 IEEE LEOS Annual Meeting Conference Proceedings

Y2 - 26 October 2003 through 30 October 2003

ER -

Micromolding of high Q toroid resonators

Abstract

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