Micromolding of high Q toroid resonators

A. Martin, L. Yang, D. Armani, K. Vahala

Research output: Contribution to journalConference articlepeer-review


Using silica ultra-high-Q toroid microcavity masters, replica molding is applied to fabricate polymer microcavity arrays with Q factors in excess of 105. It is demonstrated that anovel technique that replicates silica ultra-high-Q microtoroid cavity masters in Vicast and PDMS. This fabrication techniques results in planar polymer micro-cavity arrays with Q factors in excess 105, and provides a potentially low cost method to manufacture resonator arrays.

Original languageEnglish
Pages (from-to)1022-1023
Number of pages2
JournalConference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
StatePublished - 2003
Event2003 IEEE LEOS Annual Meeting Conference Proceedings - TUCSON, AZ, United States
Duration: Oct 26 2003Oct 30 2003


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