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Microfabrication of WO
3
-based microelectrochemical devices
Martin O. Schloh
, Nicholas Leventis
, Mark S. Wrighton
Department of Chemistry
Research output
:
Contribution to journal
›
Article
›
peer-review
17
Scopus citations
Overview
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3
-based microelectrochemical devices'. Together they form a unique fingerprint.
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Keyphrases
PH Dependence
100%
Microelectrode Array
100%
Multi-electrode
100%
Transistor
100%
Microfabrication
100%
Surface Scan
100%
Scanning Electron Microscopy
100%
Characteristic-based
100%
Photolithography Process
100%
Electrical Characteristics
100%
Surface Profilometry
100%
Pt Microelectrode
100%
Reversible Electrochemical Reaction
100%
Modified Microelectrodes
100%
Dry Etching Process
100%
Photolithographic
100%
Material Science
Scanning Electron Microscopy
100%
Microfabrication
100%
Electrochemical Reaction
100%
Transistor
100%
Dry Etching
100%
Surface (Surface Science)
100%
Engineering
Microfabrication
100%
Microelectrode Array
100%
Ph Dependent
100%
Polycrystalline
100%
Dry Etching
100%
Etching Process
100%