Microfabrication of oxidation-sharpened silicon tips on silicon nitride cantilevers for atomic force microscopy

Albert Folch; Mark S. Wrighton; Martin A. Schmidt

doi:10.1109/84.650126

Microfabrication of oxidation-sharpened silicon tips on silicon nitride cantilevers for atomic force microscopy

Albert Folch
, Mark S. Wrighton
, Martin A. Schmidt

Department of Chemistry

Research output: Contribution to journal › Article › peer-review

42 Scopus citations

Abstract

We have developed a novel process for the microfabrication of atomic force microscope (AFM) cantilevered tips from silicon-on-insulator (SOI) wafers. The tip and cantilever are made of crystalline silicon and low-stress silicon nitride, respectively. This choice of materials allows us to sharpen the tips by oxidation sharpening without affecting the cantilever. We evaluated their performance in contact mode during imaging of artificial nanostructures and compared them to commercially available ones. The images acquired with our tips feature superior resolution on those samples. [270].

Original language	English
Pages (from-to)	303-306
Number of pages	4
Journal	Journal of Microelectromechanical Systems
Volume	6
Issue number	4
DOIs	https://doi.org/10.1109/84.650126
State	Published - Dec 1997

Keywords

Atomic force microscope
Microfabricated cantilevers
Microfabricated tips
Silicon-on-insulator wafers

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10.1109/84.650126

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title = "Microfabrication of oxidation-sharpened silicon tips on silicon nitride cantilevers for atomic force microscopy",

abstract = "We have developed a novel process for the microfabrication of atomic force microscope (AFM) cantilevered tips from silicon-on-insulator (SOI) wafers. The tip and cantilever are made of crystalline silicon and low-stress silicon nitride, respectively. This choice of materials allows us to sharpen the tips by oxidation sharpening without affecting the cantilever. We evaluated their performance in contact mode during imaging of artificial nanostructures and compared them to commercially available ones. The images acquired with our tips feature superior resolution on those samples. [270].",

keywords = "Atomic force microscope, Microfabricated cantilevers, Microfabricated tips, Silicon-on-insulator wafers",

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T1 - Microfabrication of oxidation-sharpened silicon tips on silicon nitride cantilevers for atomic force microscopy

AU - Folch, Albert

AU - Wrighton, Mark S.

AU - Schmidt, Martin A.

PY - 1997/12

Y1 - 1997/12

N2 - We have developed a novel process for the microfabrication of atomic force microscope (AFM) cantilevered tips from silicon-on-insulator (SOI) wafers. The tip and cantilever are made of crystalline silicon and low-stress silicon nitride, respectively. This choice of materials allows us to sharpen the tips by oxidation sharpening without affecting the cantilever. We evaluated their performance in contact mode during imaging of artificial nanostructures and compared them to commercially available ones. The images acquired with our tips feature superior resolution on those samples. [270].

AB - We have developed a novel process for the microfabrication of atomic force microscope (AFM) cantilevered tips from silicon-on-insulator (SOI) wafers. The tip and cantilever are made of crystalline silicon and low-stress silicon nitride, respectively. This choice of materials allows us to sharpen the tips by oxidation sharpening without affecting the cantilever. We evaluated their performance in contact mode during imaging of artificial nanostructures and compared them to commercially available ones. The images acquired with our tips feature superior resolution on those samples. [270].

KW - Atomic force microscope

KW - Microfabricated cantilevers

KW - Microfabricated tips

KW - Silicon-on-insulator wafers

UR - https://www.scopus.com/pages/publications/0031375069

U2 - 10.1109/84.650126

DO - 10.1109/84.650126

M3 - Article

AN - SCOPUS:0031375069

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JO - Journal of Microelectromechanical Systems

JF - Journal of Microelectromechanical Systems

IS - 4

ER -

Microfabrication of oxidation-sharpened silicon tips on silicon nitride cantilevers for atomic force microscopy

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Keywords

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