@inproceedings{32fa598ed23045d9844c1435436649f1,
title = "Large area metal nanowire arrays with submicron pitch and tunable sub-20 nm nanogaps",
abstract = "We present a new top-down nanofabrication technology to realize large area metal nanowire (m-NW) arrays with tunable sub-20 nm separation nanogaps without the use of chemical etching or milling of the metal layer. The nanofabrication technology is based on a self-regulating metal deposition process that is facilitated by closely spaced and isolated heterogeneous template surfaces that confines the metal deposition into two dimensions. Electrically isolated parallel arrays of m-NW can be realized with uniform and controllable nanogaps. Au-NW arrays are presented with high-density ∼105 NWs cm -1, variable NW diameters down to 50 nm, variable nanogaps down to 5 nm, and very large nanogap length density ∼1 km cm-2. A spatially averaged surface enhanced Raman scattering (SERS) analytical enhancement factor of (1.5±0.2)×107 is demonstrated from a benzenethiol monolayer chemisorbed on a Au-NW array substrate.",
keywords = "Metal nanowires arrays, nanograting, plasmonic substrate, SERS, top-down nanofabrication",
author = "\{Le Thi Ngoc\}, L. and M. Jin and \{Van Den Berg\}, A. and Carlen, \{E. T.\}",
year = "2013",
doi = "10.1109/Transducers.2013.6626738",
language = "English",
isbn = "9781467359818",
series = "2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013",
pages = "206--209",
booktitle = "2013 Transducers and Eurosensors XXVII",
note = "2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 ; Conference date: 16-06-2013 Through 20-06-2013",
}