Integrated Lithium-Niobate Nonlinear Photonics Enabled by Wet-Etching Technology

Wenbo Mao; Di Jia; Kashif M. Awan; Fu Li; Lan Yang

doi:10.1364/FIO.2023.JM4A.56

Integrated Lithium-Niobate Nonlinear Photonics Enabled by Wet-Etching Technology

Wenbo Mao
, Di Jia
, Kashif M. Awan
, Fu Li
, Lan Yang

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

We demonstrated various chip-scale lithium-niobate nonlinear-optical devices using wet etching fabrication techniques. The low-cost wet etching process achieves device performance comparable to widely used dry processes.

Original language	English
Title of host publication	Frontiers in Optics
Subtitle of host publication	Proceedings Frontiers in Optics + Laser Science 2023, FiO, LS 2023
Publisher	Optical Society of America
ISBN (Electronic)	9781957171296
DOIs	https://doi.org/10.1364/FIO.2023.JM4A.56
State	Published - 2023
Event	Frontiers in Optics + Laser Science 2023, FiO, LS 203: Part of Frontiers in Optics + Laser Science 2023 - Tacoma, United States Duration: Oct 9 2023 → Oct 12 2023

Publication series

Name	Frontiers in Optics: Proceedings Frontiers in Optics + Laser Science 2023, FiO, LS 2023

Conference

Conference	Frontiers in Optics + Laser Science 2023, FiO, LS 203: Part of Frontiers in Optics + Laser Science 2023
Country/Territory	United States
City	Tacoma
Period	10/9/23 → 10/12/23

Access to Document

10.1364/FIO.2023.JM4A.56

Cite this

Mao, W., Jia, D., Awan, K. M., Li, F., & Yang, L. (2023). Integrated Lithium-Niobate Nonlinear Photonics Enabled by Wet-Etching Technology. In Frontiers in Optics: Proceedings Frontiers in Optics + Laser Science 2023, FiO, LS 2023 (Frontiers in Optics: Proceedings Frontiers in Optics + Laser Science 2023, FiO, LS 2023). Optical Society of America. https://doi.org/10.1364/FIO.2023.JM4A.56

@inproceedings{2828b358e21541f59751afa1e2548c91,

title = "Integrated Lithium-Niobate Nonlinear Photonics Enabled by Wet-Etching Technology",

abstract = "We demonstrated various chip-scale lithium-niobate nonlinear-optical devices using wet etching fabrication techniques. The low-cost wet etching process achieves device performance comparable to widely used dry processes.",

author = "Wenbo Mao and Di Jia and Awan, \{Kashif M.\} and Fu Li and Lan Yang",

note = "Publisher Copyright: {\textcopyright} Optica Publishing Group 2023, {\textcopyright} 2023 The Authors.; Frontiers in Optics + Laser Science 2023, FiO, LS 203: Part of Frontiers in Optics + Laser Science 2023 ; Conference date: 09-10-2023 Through 12-10-2023",

year = "2023",

doi = "10.1364/FIO.2023.JM4A.56",

language = "English",

series = "Frontiers in Optics: Proceedings Frontiers in Optics + Laser Science 2023, FiO, LS 2023",

publisher = "Optical Society of America",

booktitle = "Frontiers in Optics",

}

Mao, W, Jia, D, Awan, KM, Li, F & Yang, L 2023, Integrated Lithium-Niobate Nonlinear Photonics Enabled by Wet-Etching Technology. in Frontiers in Optics: Proceedings Frontiers in Optics + Laser Science 2023, FiO, LS 2023. Frontiers in Optics: Proceedings Frontiers in Optics + Laser Science 2023, FiO, LS 2023, Optical Society of America, Frontiers in Optics + Laser Science 2023, FiO, LS 203: Part of Frontiers in Optics + Laser Science 2023, Tacoma, United States, 10/9/23. https://doi.org/10.1364/FIO.2023.JM4A.56

Integrated Lithium-Niobate Nonlinear Photonics Enabled by Wet-Etching Technology. / Mao, Wenbo; Jia, Di; Awan, Kashif M. et al.
Frontiers in Optics: Proceedings Frontiers in Optics + Laser Science 2023, FiO, LS 2023. Optical Society of America, 2023. (Frontiers in Optics: Proceedings Frontiers in Optics + Laser Science 2023, FiO, LS 2023).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Integrated Lithium-Niobate Nonlinear Photonics Enabled by Wet-Etching Technology

AU - Mao, Wenbo

AU - Jia, Di

AU - Awan, Kashif M.

AU - Li, Fu

AU - Yang, Lan

PY - 2023

Y1 - 2023

N2 - We demonstrated various chip-scale lithium-niobate nonlinear-optical devices using wet etching fabrication techniques. The low-cost wet etching process achieves device performance comparable to widely used dry processes.

AB - We demonstrated various chip-scale lithium-niobate nonlinear-optical devices using wet etching fabrication techniques. The low-cost wet etching process achieves device performance comparable to widely used dry processes.

UR - https://www.scopus.com/pages/publications/85191197075

U2 - 10.1364/FIO.2023.JM4A.56

DO - 10.1364/FIO.2023.JM4A.56

M3 - Conference contribution

AN - SCOPUS:85191197075

T3 - Frontiers in Optics: Proceedings Frontiers in Optics + Laser Science 2023, FiO, LS 2023

BT - Frontiers in Optics

PB - Optical Society of America

T2 - Frontiers in Optics + Laser Science 2023, FiO, LS 203: Part of Frontiers in Optics + Laser Science 2023

Y2 - 9 October 2023 through 12 October 2023

ER -

Integrated Lithium-Niobate Nonlinear Photonics Enabled by Wet-Etching Technology

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