Integrated Lithium-Niobate Nonlinear Photonics Enabled by Wet-Etching Technology

Wenbo Mao; Di Jia; Kashif M. Awan; Fu Li; Lan Yang

Integrated Lithium-Niobate Nonlinear Photonics Enabled by Wet-Etching Technology

Wenbo Mao
, Di Jia
, Kashif M. Awan
, Fu Li
, Lan Yang

Research output: Contribution to conference › Paper › peer-review

Abstract

We demonstrated various chip-scale lithium-niobate nonlinear-optical devices using wet etching fabrication techniques. The low-cost wet etching process achieves device performance comparable to widely used dry processes.

Original language	English
State	Published - 2023
Event	2023 Laser Science, LS 2023 - Tacoma, United States Duration: Oct 9 2023 → Oct 12 2023

Conference

Conference	2023 Laser Science, LS 2023
Country/Territory	United States
City	Tacoma
Period	10/9/23 → 10/12/23

Cite this

@conference{fce4eb56487c45a8ad1275d8f2b54161,

title = "Integrated Lithium-Niobate Nonlinear Photonics Enabled by Wet-Etching Technology",

abstract = "We demonstrated various chip-scale lithium-niobate nonlinear-optical devices using wet etching fabrication techniques. The low-cost wet etching process achieves device performance comparable to widely used dry processes.",

author = "Wenbo Mao and Di Jia and Awan, \{Kashif M.\} and Fu Li and Lan Yang",

note = "Publisher Copyright: {\textcopyright} Optica Publishing Group 2023, {\textcopyright} 2023 The Authors.; 2023 Laser Science, LS 2023 ; Conference date: 09-10-2023 Through 12-10-2023",

year = "2023",

language = "English",

}

TY - CONF

T1 - Integrated Lithium-Niobate Nonlinear Photonics Enabled by Wet-Etching Technology

AU - Mao, Wenbo

AU - Jia, Di

AU - Awan, Kashif M.

AU - Li, Fu

AU - Yang, Lan

PY - 2023

Y1 - 2023

N2 - We demonstrated various chip-scale lithium-niobate nonlinear-optical devices using wet etching fabrication techniques. The low-cost wet etching process achieves device performance comparable to widely used dry processes.

AB - We demonstrated various chip-scale lithium-niobate nonlinear-optical devices using wet etching fabrication techniques. The low-cost wet etching process achieves device performance comparable to widely used dry processes.

UR - https://www.scopus.com/pages/publications/85215521992

M3 - Paper

AN - SCOPUS:85215521992

T2 - 2023 Laser Science, LS 2023

Y2 - 9 October 2023 through 12 October 2023

ER -

Integrated Lithium-Niobate Nonlinear Photonics Enabled by Wet-Etching Technology

Abstract

Conference

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