Abstract
Epitaxy of single-crystalline materials laid the foundation for numerous electronics as a core technology. Nevertheless, because the single-crystalline epilayers are covalently bonded to substrates, only limited applications were explored. The recent development of layer transfer techniques has suggested another way involving the production of freestanding membranes that are free from substrates. In this review, we comprehensively catalog recent advances for freestanding-membrane-based electronics from transistors and memory storage to sensors and energy harvesters. We highlight their unique advantages, including flexibility, unique physical coupling, heterointegrability, and cost-effectiveness, and summarize their challenges and perspectives.
| Original language | English |
|---|---|
| Pages (from-to) | 690-704 |
| Number of pages | 15 |
| Journal | ACS Applied Electronic Materials |
| Volume | 5 |
| Issue number | 2 |
| DOIs | |
| State | Published - Feb 28 2023 |
Keywords
- electronics
- epitaxy
- freestanding membranes
- heterointegration
- thin films
- two-dimensional materials