Flexible polymer packaged high-Q WGM resonators for displacement detection

Jie Liao, Abraham J. Qavi, Maxwell R. Adolphson, Lan Yang

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations


Whispering Gallery Mode (WGM) sensors provide high sensitivity, high resolution, small footprint, and resistance to electromagnetic interference, making them a great option for displacement sensing. An efficient method of coupling light into and out of WGM resonators is through the use of tapered tapers, but their instability can be a limitation in practical applications. Conventional packaging methods for WGM resonators use UV-curable polymers with low refractive indices to improve robustness, but their rigidity can make them less suitable for displacement sensing. Additionally, their high cost, potential toxicity and the interference from ambient moisture pose a critical issue. In this study, we demonstrate an alternative method of packaging WGM devices using non-toxic polydimethylsiloxane (PDMS). The Q-factor of 107 is achieved at the 780 nm band. The PDMS packaging technique not only improves the robustness and compactness of the WGM device, but also enhances humidity resistance significantly. By take advantages of the unique flexibility of PDMS, we demonstrate displacement detection with a high sensitivity of ~0.1 pm/µm and a detection limit of 600 nm.

Original languageEnglish
Title of host publicationIntegrated Optics
Subtitle of host publicationDevices, Materials, and Technologies XXVII
EditorsSonia M. Garcia-Blanco, Pavel Cheben
ISBN (Electronic)9781510659537
StatePublished - 2023
EventIntegrated Optics: Devices, Materials, and Technologies XXVII 2023 - San Francisco, United States
Duration: Jan 30 2023Feb 2 2023

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X


ConferenceIntegrated Optics: Devices, Materials, and Technologies XXVII 2023
Country/TerritoryUnited States
CitySan Francisco


  • Optofluidics
  • Photonics
  • Sensors
  • Whispering Gallery Modes


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