@inproceedings{0b2e6a3b738a45efba14a248794de1c1,
title = "Fabrication of electroactive polymer actuators for adjustable X-ray optics",
abstract = "Adjustable X-ray mirror facets have been identified as a technology that could enable >2m2 effective area X-ray optics with sub-arcsecond angular resolution. Electroactive polymers can produce high strains at low voltages, being able to correct the deformations that submillimeter-thick mirror shells experience during mounting and assembly of the optical system. In this paper, we describe the fabrication of μm-scale poly-vinylidene fluoride- co-trifluoroethylene (PVDF-TrFE) electroactive polymer films on at Si substrates with individually-addressable electrodes. The fabrication protocol is low-cost, scalable, and can easily be translated to production by industrial partners. With fabrication temperatures below 150° C, PVDF-TrFE actuator arrays can be deposited on mirror substrates inducing minimal thermal and coating stress.",
keywords = "Electroactive polymer, Si wafer, Spin coating, Sputter deposition",
author = "A. Debnath and M. Errando",
note = "Publisher Copyright: {\textcopyright} 2021 SPIE.; Optics for EUV, X-Ray, and Gamma-Ray Astronomy X 2021 ; Conference date: 01-08-2021 Through 05-08-2021",
year = "2021",
doi = "10.1117/12.2594778",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "O'Dell, \{Stephen L.\} and Gaskin, \{Jessica A.\} and Giovanni Pareschi",
booktitle = "Optics for EUV, X-Ray, and Gamma-Ray Astronomy X",
}