Fabrication and surface treatment of electron-beam evaporated niobium for low-loss coplanar waveguide resonators

D. Kowsari; K. Zheng; J. T. Monroe; N. J. Thobaben; X. Du; P. M. Harrington; E. A. Henriksen; D. S. Wisbey; K. W. Murch

doi:10.1063/5.0066441

Fabrication and surface treatment of electron-beam evaporated niobium for low-loss coplanar waveguide resonators

D. Kowsari
, K. Zheng
, J. T. Monroe
, N. J. Thobaben
, X. Du
, P. M. Harrington
, E. A. Henriksen
, D. S. Wisbey
, K. W. Murch

Research output: Contribution to journal › Article › peer-review

13 Scopus citations

Abstract

We characterize low-loss electron-beam evaporated niobium thin films deposited under ultra-high vacuum conditions. Slow deposition yields films with a high superconducting transition temperature (9:20±0:06 K) as well as a residual resistivity ratio of 4.8. We fabricate the films into coplanar waveguide resonators to extract the intrinsic loss due to the presence of two-level-system fluctuators using microwave measurements. For a coplanar waveguide resonator gap of 2um, the films exhibit filling-factor-adjusted two-level-system loss tangents as low as 1.5 ×10^-7 with single-photon regime internal quality factors in excess of one million after removing native surface oxides of the niobium..

Original language	English
Article number	132601
Pages (from-to)	1ENG
Journal	Applied Physics Letters
Volume	119
Issue number	13
DOIs	https://doi.org/10.1063/5.0066441
State	Published - Sep 27 2021

Access to Document

10.1063/5.0066441

Cite this

@article{788651338214468485ffcb7d51f6b139,

title = "Fabrication and surface treatment of electron-beam evaporated niobium for low-loss coplanar waveguide resonators",

abstract = "We characterize low-loss electron-beam evaporated niobium thin films deposited under ultra-high vacuum conditions. Slow deposition yields films with a high superconducting transition temperature (9:20±0:06 K) as well as a residual resistivity ratio of 4.8. We fabricate the films into coplanar waveguide resonators to extract the intrinsic loss due to the presence of two-level-system fluctuators using microwave measurements. For a coplanar waveguide resonator gap of 2um, the films exhibit filling-factor-adjusted two-level-system loss tangents as low as 1.5 ×10-7 with single-photon regime internal quality factors in excess of one million after removing native surface oxides of the niobium..",

author = "D. Kowsari and K. Zheng and Monroe, \{J. T.\} and Thobaben, \{N. J.\} and X. Du and Harrington, \{P. M.\} and Henriksen, \{E. A.\} and Wisbey, \{D. S.\} and Murch, \{K. W.\}",

note = "Publisher Copyright: {\textcopyright} 2021 Author(s).",

year = "2021",

month = sep,

day = "27",

doi = "10.1063/5.0066441",

language = "English",

volume = "119",

pages = "1ENG",

journal = "Applied Physics Letters",

issn = "0003-6951",

number = "13",

}

TY - JOUR

T1 - Fabrication and surface treatment of electron-beam evaporated niobium for low-loss coplanar waveguide resonators

AU - Kowsari, D.

AU - Zheng, K.

AU - Monroe, J. T.

AU - Thobaben, N. J.

AU - Du, X.

AU - Harrington, P. M.

AU - Henriksen, E. A.

AU - Wisbey, D. S.

AU - Murch, K. W.

PY - 2021/9/27

Y1 - 2021/9/27

N2 - We characterize low-loss electron-beam evaporated niobium thin films deposited under ultra-high vacuum conditions. Slow deposition yields films with a high superconducting transition temperature (9:20±0:06 K) as well as a residual resistivity ratio of 4.8. We fabricate the films into coplanar waveguide resonators to extract the intrinsic loss due to the presence of two-level-system fluctuators using microwave measurements. For a coplanar waveguide resonator gap of 2um, the films exhibit filling-factor-adjusted two-level-system loss tangents as low as 1.5 ×10-7 with single-photon regime internal quality factors in excess of one million after removing native surface oxides of the niobium..

AB - We characterize low-loss electron-beam evaporated niobium thin films deposited under ultra-high vacuum conditions. Slow deposition yields films with a high superconducting transition temperature (9:20±0:06 K) as well as a residual resistivity ratio of 4.8. We fabricate the films into coplanar waveguide resonators to extract the intrinsic loss due to the presence of two-level-system fluctuators using microwave measurements. For a coplanar waveguide resonator gap of 2um, the films exhibit filling-factor-adjusted two-level-system loss tangents as low as 1.5 ×10-7 with single-photon regime internal quality factors in excess of one million after removing native surface oxides of the niobium..

UR - https://www.scopus.com/pages/publications/85115946435

U2 - 10.1063/5.0066441

DO - 10.1063/5.0066441

M3 - Article

AN - SCOPUS:85115946435

SN - 0003-6951

VL - 119

SP - 1ENG

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 13

M1 - 132601

ER -

Fabrication and surface treatment of electron-beam evaporated niobium for low-loss coplanar waveguide resonators

Abstract

Access to Document

Other files and links

Fingerprint

Cite this