Effects of nitrogen on the growth and optical properties of ZnO thin films grown by pulsed laser deposition

J. B. Cui; M. A. Thomas; Y. C. Soo; H. Kandel; T. P. Chen

doi:10.1088/0022-3727/42/15/155407

Effects of nitrogen on the growth and optical properties of ZnO thin films grown by pulsed laser deposition

J. B. Cui
, M. A. Thomas
, Y. C. Soo
, H. Kandel
, T. P. Chen

Section of Interventional Radiology

Research output: Contribution to journal › Article › peer-review

10 Scopus citations

Abstract

ZnO thin films were grown using pulsed laser deposition by ablating a Zn target in various mixtures of O₂ and N₂. The presence of N₂ during deposition was found to affect the growth of the ZnO thin films and their optical properties. Small N₂ concentrations during growth led to strong acceptor-related photoluminescence (PL), while larger concentrations affected both the intensity and temperature dependence of the emission peaks. In addition, the PL properties of the annealed ZnO thin films are associated with the N₂ concentration during their growth. The possible role of nitrogen in ZnO growth and annealing is discussed.

Original language	English
Article number	155407
Journal	Journal of Physics D: Applied Physics
Volume	42
Issue number	15
DOIs	https://doi.org/10.1088/0022-3727/42/15/155407
State	Published - 2009

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title = "Effects of nitrogen on the growth and optical properties of ZnO thin films grown by pulsed laser deposition",

abstract = "ZnO thin films were grown using pulsed laser deposition by ablating a Zn target in various mixtures of O2 and N2. The presence of N2 during deposition was found to affect the growth of the ZnO thin films and their optical properties. Small N2 concentrations during growth led to strong acceptor-related photoluminescence (PL), while larger concentrations affected both the intensity and temperature dependence of the emission peaks. In addition, the PL properties of the annealed ZnO thin films are associated with the N2 concentration during their growth. The possible role of nitrogen in ZnO growth and annealing is discussed.",

author = "Cui, \{J. B.\} and Thomas, \{M. A.\} and Soo, \{Y. C.\} and H. Kandel and Chen, \{T. P.\}",

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journal = "Journal of Physics D: Applied Physics",

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T1 - Effects of nitrogen on the growth and optical properties of ZnO thin films grown by pulsed laser deposition

AU - Cui, J. B.

AU - Thomas, M. A.

AU - Soo, Y. C.

AU - Kandel, H.

AU - Chen, T. P.

PY - 2009

Y1 - 2009

N2 - ZnO thin films were grown using pulsed laser deposition by ablating a Zn target in various mixtures of O2 and N2. The presence of N2 during deposition was found to affect the growth of the ZnO thin films and their optical properties. Small N2 concentrations during growth led to strong acceptor-related photoluminescence (PL), while larger concentrations affected both the intensity and temperature dependence of the emission peaks. In addition, the PL properties of the annealed ZnO thin films are associated with the N2 concentration during their growth. The possible role of nitrogen in ZnO growth and annealing is discussed.

AB - ZnO thin films were grown using pulsed laser deposition by ablating a Zn target in various mixtures of O2 and N2. The presence of N2 during deposition was found to affect the growth of the ZnO thin films and their optical properties. Small N2 concentrations during growth led to strong acceptor-related photoluminescence (PL), while larger concentrations affected both the intensity and temperature dependence of the emission peaks. In addition, the PL properties of the annealed ZnO thin films are associated with the N2 concentration during their growth. The possible role of nitrogen in ZnO growth and annealing is discussed.

UR - https://www.scopus.com/pages/publications/70349105160

U2 - 10.1088/0022-3727/42/15/155407

DO - 10.1088/0022-3727/42/15/155407

M3 - Article

AN - SCOPUS:70349105160

SN - 0022-3727

VL - 42

JO - Journal of Physics D: Applied Physics

JF - Journal of Physics D: Applied Physics

IS - 15

M1 - 155407

ER -

Effects of nitrogen on the growth and optical properties of ZnO thin films grown by pulsed laser deposition

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