Coupled-flux nucleation modeling of oxygen precipitation in silicon

Keyphrases

• Long-range Diffusion 100%
• Classical Theory 100%
• Oxygen Precipitation 100%
• Oxygen Loss 100%
• Nucleation Modelling 100%
• Dislocation 50%
• Nucleation Mechanism 50%
• Low Temperature 50%
• Diffusion Coefficient 50%
• Diffusion Control 50%
• Correct Model 50%
• Controlled nucleation 50%
• Flux Model 50%
• Annealing Treatment 50%
• Diffusion-controlled Growth 50%
• Precipitation Process 50%
• Nucleation Theory 50%
• Czochralski Silicon 50%
• Nucleation Temperature 50%
• Oxygen Diffusion Rate 50%
• Solid-state Precipitation 50%
• High-temperature Diffusion 50%

Engineering

• Good Agreement 100%
• Range Diffusion 100%
• Diffusion Coefficient 50%
• Low-Temperature 50%
• Experimental Observation 50%
• Classical Theory 50%
• Classical Nucleation Theory 50%

Material Science

• Nucleation 100%
• Silicon 100%
• Density 22%
• Diffusivity 11%