Convective diffusion of particles in external force fields: the role of electrostatics on particle removal from turbulently-mixed gases

Jay R. Turner; Heinz J. Fissan

doi:10.1016/0009-2509(89)87024-1

Convective diffusion of particles in external force fields: the role of electrostatics on particle removal from turbulently-mixed gases

Jay R. Turner
, Heinz J. Fissan

Research output: Contribution to journal › Article › peer-review

11 Scopus citations

Abstract

A theoretical model is presented to describe particle deposition to smooth, flat surfaces from turbulently-mixed gases. The deposition rate of inertialess particles is expressed in terms of a generalized external force which acts on the particles. Examples are given for particle deposition due to diffusion, sedimentation and electrostatic forces. Ranges for the dependent variables were chosen to reflect conditions which may be present near wafers during semiconductor device manufacture.

Original language	English
Pages (from-to)	1255-1261
Number of pages	7
Journal	Chemical Engineering Science
Volume	44
Issue number	5
DOIs	https://doi.org/10.1016/0009-2509(89)87024-1
State	Published - 1989

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10.1016/0009-2509(89)87024-1

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title = "Convective diffusion of particles in external force fields: the role of electrostatics on particle removal from turbulently-mixed gases",

abstract = "A theoretical model is presented to describe particle deposition to smooth, flat surfaces from turbulently-mixed gases. The deposition rate of inertialess particles is expressed in terms of a generalized external force which acts on the particles. Examples are given for particle deposition due to diffusion, sedimentation and electrostatic forces. Ranges for the dependent variables were chosen to reflect conditions which may be present near wafers during semiconductor device manufacture.",

author = "Turner, \{Jay R.\} and Fissan, \{Heinz J.\}",

year = "1989",

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journal = "Chemical Engineering Science",

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T1 - Convective diffusion of particles in external force fields

T2 - the role of electrostatics on particle removal from turbulently-mixed gases

AU - Turner, Jay R.

AU - Fissan, Heinz J.

PY - 1989

Y1 - 1989

N2 - A theoretical model is presented to describe particle deposition to smooth, flat surfaces from turbulently-mixed gases. The deposition rate of inertialess particles is expressed in terms of a generalized external force which acts on the particles. Examples are given for particle deposition due to diffusion, sedimentation and electrostatic forces. Ranges for the dependent variables were chosen to reflect conditions which may be present near wafers during semiconductor device manufacture.

AB - A theoretical model is presented to describe particle deposition to smooth, flat surfaces from turbulently-mixed gases. The deposition rate of inertialess particles is expressed in terms of a generalized external force which acts on the particles. Examples are given for particle deposition due to diffusion, sedimentation and electrostatic forces. Ranges for the dependent variables were chosen to reflect conditions which may be present near wafers during semiconductor device manufacture.

UR - https://www.scopus.com/pages/publications/0024894878

U2 - 10.1016/0009-2509(89)87024-1

DO - 10.1016/0009-2509(89)87024-1

M3 - Article

AN - SCOPUS:0024894878

SN - 0009-2509

VL - 44

SP - 1255

EP - 1261

JO - Chemical Engineering Science

JF - Chemical Engineering Science

IS - 5

ER -

Convective diffusion of particles in external force fields: the role of electrostatics on particle removal from turbulently-mixed gases

Abstract

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