A lithographically-patterned, elastic multi-electrode array for surface stimulation of the spinal cord

Kathleen W. Meacham, Richard J. Giuly, Liang Guo, Shawn Hochman, Stephen P. DeWeerth

Research output: Contribution to journalArticlepeer-review

88 Scopus citations

Abstract

A new, scalable process for microfabrication of a silicone-based, elastic multi-electrode array (MEA) is presented. The device is constructed by spinning poly(dimethylsiloxane) (PDMS) silicone elastomer onto a glass slide, depositing and patterning gold to construct wires and electrodes, spinning on a second PDMS layer, and then micropatterning the second PDMS layer to expose electrode contacts. The micropatterning of PDMS involves a custom reactive ion etch (RIE) process that preserves the underlying gold thin film. Once completed, the device can be removed from the glass slide for conformal interfacing with neural tissue. Prototype MEAs feature electrodes smaller than those known to be reported on silicone substrate (60 μm diameter exposed electrode area) and were capable of selectively stimulating the surface of the in vitro isolated spinal cord of the juvenile rat. Stretchable serpentine traces were also incorporated into the functional PDMS-based MEA, and their implementation and testing is described.

Original languageEnglish
Pages (from-to)259-269
Number of pages11
JournalBiomedical Microdevices
Volume10
Issue number2
DOIs
StatePublished - Apr 2008

Keywords

  • Electrophysiology
  • Multi-electrode array
  • Neural control
  • Neural interfacing
  • Neural prosthetic
  • Poly(dimethylsiloxane)
  • Spinal cord
  • Spinal cord injury
  • Surface stimulation

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